Plasma enhanced chemical vapor deposition of deuterated diamond like carbon films for photocathode application
نویسنده
چکیده
The influence of diamond like carbon films properties on quantum efficiency of prepared transmission photocathodes has been investigated. DLC films were deposited on silicon substrate and stainless steel mesh by PECVD using methane, argon and hydrogen or deuterium gas mixtures. Photocathodes prepared with deuterated DLC film have higher quantum efficiency than photocathodes prepared with hydrogenated DLC film and photocathode quantum efficiency rise up with deuterium and hydrogen flow rate.
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